Formation of Porous Silicon by Nanopowder Sintering
- Authors: Astrova E.V.1, Voronkov V.B.1, Nashchekin A.V.1, Parfeneva A.V.1, Lozhkina D.A.1, Tomkovich M.V.1, Kukushkina Y.A.1
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Affiliations:
- Ioffe Institute
- Issue: Vol 53, No 4 (2019)
- Pages: 530-539
- Section: Physics of Semiconductor Devices
- URL: https://journals.rcsi.science/1063-7826/article/view/205991
- DOI: https://doi.org/10.1134/S1063782619040031
- ID: 205991
Cite item
Abstract
The technique of the electrochemical and photoelectrochemical etching of single-crystal silicon wafers commonly used to fabricate macroporous silicon layers is inefficient and costly. An alternative method for forming bulk macroporous silicon is the high-temperature sintering of Si powder. The process of nanopowder sintering preliminarily subjected to dry cold compression (without binding additives) is investigated. The properties of the sintered material, including its microstructure, density, and electrical conductivity, are studied at different annealing temperature and time. Techniques for changing the porosity of the sintered samples and for determining of the interior surface area are discussed.
About the authors
E. V. Astrova
Ioffe Institute
Author for correspondence.
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
V. B. Voronkov
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. V. Nashchekin
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
A. V. Parfeneva
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
D. A. Lozhkina
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
M. V. Tomkovich
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021
Yu. A. Kukushkina
Ioffe Institute
Email: east@mail.ioffe.ru
Russian Federation, St. Petersburg, 194021