Low-temperature deposition of SiNx Films in SiH4/Ar + N2 inductively coupled plasma under high silane dilution with argon
- 作者: Okhapkin A.1, Korolyov S.1, Yunin P.1, Drozdov M.1, Kraev S.1, Khrykin O.1, Shashkin V.1
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隶属关系:
- Institute for Physics of Microstructures
- 期: 卷 51, 编号 11 (2017)
- 页面: 1449-1452
- 栏目: XXI International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 13–16, 2017
- URL: https://journals.rcsi.science/1063-7826/article/view/201570
- DOI: https://doi.org/10.1134/S1063782617110215
- ID: 201570
如何引用文章
详细
SiNx films on silicon are grown in SiH4/Ar + N2 inductively coupled plasma under high silane dilution with argon. The dependences of the deposition rate and properties of silicon nitride on the plasmagas composition, pressure, radio-frequency power and inductive power are studied. In some cases, the found dependences differ from published data for undiluted reagents. It is found that the lowest impurity content in films and their best properties are implemented at a nitrogen-to-silane ratio close to 1.4. An increase in the radio-frequency power results in smoother samples due to the polishing effect of argon ions.
作者简介
A. Okhapkin
Institute for Physics of Microstructures
编辑信件的主要联系方式.
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
S. Korolyov
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
P. Yunin
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
M. Drozdov
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
S. Kraev
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
O. Khrykin
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087
V. Shashkin
Institute for Physics of Microstructures
Email: andy-ohapkin@yandex.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603087