Effect of the Ti-Nanolayer Thickness on the Self-Lift-off of Thick GaN Epitaxial Layers
- Authors: Yugov A.A.1, Malahov S.S.1, Donskov A.A.1, Duhnovskii M.P.2, Knyazev S.N.1, Kozlova Y.P.3, Yugova T.G.1, Belogorokhov I.A.1
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Affiliations:
- State Research and Project Institute of Rare-Metal Industry GIREDMET
- Research and Production Corporation “Istok”
- Institute for Nuclear Research, Russian Academy of Sciences
- Issue: Vol 50, No 3 (2016)
- Pages: 411-414
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/196932
- DOI: https://doi.org/10.1134/S1063782616030246
- ID: 196932
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