Effect of the Ti-Nanolayer Thickness on the Self-Lift-off of Thick GaN Epitaxial Layers
- Authors: Yugov A.A.1, Malahov S.S.1, Donskov A.A.1, Duhnovskii M.P.2, Knyazev S.N.1, Kozlova Y.P.3, Yugova T.G.1, Belogorokhov I.A.1
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Affiliations:
- State Research and Project Institute of Rare-Metal Industry GIREDMET
- Research and Production Corporation “Istok”
- Institute for Nuclear Research, Russian Academy of Sciences
- Issue: Vol 50, No 3 (2016)
- Pages: 411-414
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/196932
- DOI: https://doi.org/10.1134/S1063782616030246
- ID: 196932
Cite item
Abstract
The effect of the type of substrate, sapphire substrate (c- and r-orientation) or GaN/Al2O3 template (c- and r-orientations), on the nitridation of an amorphous titanium nanolayer is shown. The effect of the titanium-nanolayer thickness on thick GaN epitaxial layer self-separation from the substrate is revealed. The titanium-nanolayer thickness at which thick GaN layer is reproducibly self-separated is within 20–40 nm.
About the authors
A. A. Yugov
State Research and Project Institute of Rare-Metal Industry GIREDMET
Author for correspondence.
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017
S. S. Malahov
State Research and Project Institute of Rare-Metal Industry GIREDMET
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017
A. A. Donskov
State Research and Project Institute of Rare-Metal Industry GIREDMET
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017
M. P. Duhnovskii
Research and Production Corporation “Istok”
Email: P_Yugov@mail.ru
Russian Federation, ul. Vokzalnaya 2a, Fryazino, Moscow oblast, 141190
S. N. Knyazev
State Research and Project Institute of Rare-Metal Industry GIREDMET
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017
Yu. P. Kozlova
Institute for Nuclear Research, Russian Academy of Sciences
Email: P_Yugov@mail.ru
Russian Federation, pr. 60-letiya Octyabrya 7a, Moscow, 117315
T. G. Yugova
State Research and Project Institute of Rare-Metal Industry GIREDMET
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017
I. A. Belogorokhov
State Research and Project Institute of Rare-Metal Industry GIREDMET
Email: P_Yugov@mail.ru
Russian Federation, Bolshoi Tolmachevskii per. 5, Moscow, 109017