Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

E. A. Kerimov; Керимов Э. А.

doi:10.31857/S0544126923700229

Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

作者: Kerimov E.¹
隶属关系:
1. Azerbaijan Technical University
期: 卷 52, 编号 2 (2023)
页面: 160-164
栏目: ТЕХНОЛОГИЯ
URL: https://journals.rcsi.science/0544-1269/article/view/138497
DOI: https://doi.org/10.31857/S0544126923700229
EDN: https://elibrary.ru/PYLCTO
ID: 138497

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详细

When studying the optical properties of thin films, in order to obtain reliable information about the magnitude of their optical constants, it is necessary to accurately measure the thickness of the metal. Thickness 600 < d < 1500 Å is measured by the method of multibeam interferometry and the resonant-frequency method.

关键词

resonant frequency method, optical constants, multibeam interferometry method, quartz element

作者简介

E. Kerimov

Azerbaijan Technical University

编辑信件的主要联系方式.
Email: E_Kerimov.fizik@mail.ru
Baku, AZ 1073 Azerbaijan

参考

Тришенков М.А. Фотоприемные устройства и ПЗС. М.: Радио и связь, 1992. 400 с.
Elliott C.T. Future infrared detector technologies // Fourth Int. Conf. on Advanced Infrared Detectors and Systems. 1990. P. 61–66.
Byrne C.F., Knowles P. Infrared formed in mercury cadmium telluride grown by MOCVD // Semicond. Sci. Technol. 1988. № 3. P. 377–381.
Иевлев В.М., Солдатенко С.А., Кущев С.Б. и др. Эффект фотонной активации синтеза пленок силицидов в гетеросистеме (111) Si–Ni–Pt // Конденсированные среды и межфазные границы. 2010. Т. 9. № 3. С. 216–227.