Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

E. A. Kerimov; Керимов Э. А.

doi:10.31857/S0544126923700229

Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide

Authors: Kerimov E.A.¹
Affiliations:
1. Azerbaijan Technical University
Issue: Vol 52, No 2 (2023)
Pages: 160-164
Section: ТЕХНОЛОГИЯ
URL: https://journals.rcsi.science/0544-1269/article/view/138497
DOI: https://doi.org/10.31857/S0544126923700229
EDN: https://elibrary.ru/PYLCTO
ID: 138497

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Abstract
About the authors
References
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Abstract

When studying the optical properties of thin films, in order to obtain reliable information about the magnitude of their optical constants, it is necessary to accurately measure the thickness of the metal. Thickness 600 < d < 1500 Å is measured by the method of multibeam interferometry and the resonant-frequency method.

Keywords

resonant frequency method, optical constants, multibeam interferometry method, quartz element

About the authors

E. A. Kerimov

Azerbaijan Technical University

Author for correspondence.
Email: E_Kerimov.fizik@mail.ru
Baku, AZ 1073 Azerbaijan

References

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