Investigation of the Optical Properties of Ultrathin Films Based on Metal Silicide
- Authors: Kerimov E.A.1
-
Affiliations:
- Azerbaijan Technical University
- Issue: Vol 52, No 2 (2023)
- Pages: 160-164
- Section: ТЕХНОЛОГИЯ
- URL: https://journals.rcsi.science/0544-1269/article/view/138497
- DOI: https://doi.org/10.31857/S0544126923700229
- EDN: https://elibrary.ru/PYLCTO
- ID: 138497
Cite item
Abstract
When studying the optical properties of thin films, in order to obtain reliable information about the magnitude of their optical constants, it is necessary to accurately measure the thickness of the metal. Thickness 600 < d < 1500 Å is measured by the method of multibeam interferometry and the resonant-frequency method.
About the authors
E. A. Kerimov
Azerbaijan Technical University
Author for correspondence.
Email: E_Kerimov.fizik@mail.ru
Baku, AZ 1073 Azerbaijan
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