On the Phase Composition, Morphology, and Optical and Electronic Characteristics of AlN Nanofilms Grown on Misoriented GaAs(100) Substrates
- 作者: Seredin P.1,2, Fedyukin A.1, Terekhov V.1, Barkov K.1, Arsentyev I.3, Bondarev A.3, Fomin E.3,4, Pikhtin N.3,4
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隶属关系:
- Voronezh State University
- Ural Federal University
- Ioffe Institute
- St. Petersburg State Electrotechnical University “LETI”
- 期: 卷 53, 编号 11 (2019)
- 页面: 1550-1557
- 栏目: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/207333
- DOI: https://doi.org/10.1134/S1063782619110174
- ID: 207333
如何引用文章
详细
Thin AlN nanofilms are produced by reactive ion-plasma deposition onto GaAs(100) substrates misoriented with respect to the 〈100〉 direction to different degrees. It is shown that growth on substrates misoriented with respect to the 〈100〉 direction to different degrees results in the formation of AlN films with different phase compositions and crystal states. An increase in the degree of misorientation of the GaAs(100) substrate used for growth influences both the structural quality of AlN nanofilms and their electronic structure, surface morphology, and optical properties. Thus, the morphology, surface composition, and optical functional characteristics of AlN/GaAs(100) heterophase systems can be controlled using differently misoriented GaAs(100) substrates.
作者简介
P. Seredin
Voronezh State University; Ural Federal University
编辑信件的主要联系方式.
Email: paul@phys.vsu.ru
俄罗斯联邦, Voronezh, 394006; Ekaterinburg, 620002
A. Fedyukin
Voronezh State University
Email: paul@phys.vsu.ru
俄罗斯联邦, Voronezh, 394006
V. Terekhov
Voronezh State University
Email: paul@phys.vsu.ru
俄罗斯联邦, Voronezh, 394006
K. Barkov
Voronezh State University
Email: paul@phys.vsu.ru
俄罗斯联邦, Voronezh, 394006
I. Arsentyev
Ioffe Institute
Email: paul@phys.vsu.ru
俄罗斯联邦, St. Petersburg, 194021
A. Bondarev
Ioffe Institute
Email: paul@phys.vsu.ru
俄罗斯联邦, St. Petersburg, 194021
E. Fomin
Ioffe Institute; St. Petersburg State Electrotechnical University “LETI”
Email: paul@phys.vsu.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197022
N. Pikhtin
Ioffe Institute; St. Petersburg State Electrotechnical University “LETI”
Email: paul@phys.vsu.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 197022