On the Phase Composition, Morphology, and Optical and Electronic Characteristics of AlN Nanofilms Grown on Misoriented GaAs(100) Substrates
- Авторы: Seredin P.1,2, Fedyukin A.1, Terekhov V.1, Barkov K.1, Arsentyev I.3, Bondarev A.3, Fomin E.3,4, Pikhtin N.3,4
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Учреждения:
- Voronezh State University
- Ural Federal University
- Ioffe Institute
- St. Petersburg State Electrotechnical University “LETI”
- Выпуск: Том 53, № 11 (2019)
- Страницы: 1550-1557
- Раздел: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/207333
- DOI: https://doi.org/10.1134/S1063782619110174
- ID: 207333
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Аннотация
Thin AlN nanofilms are produced by reactive ion-plasma deposition onto GaAs(100) substrates misoriented with respect to the 〈100〉 direction to different degrees. It is shown that growth on substrates misoriented with respect to the 〈100〉 direction to different degrees results in the formation of AlN films with different phase compositions and crystal states. An increase in the degree of misorientation of the GaAs(100) substrate used for growth influences both the structural quality of AlN nanofilms and their electronic structure, surface morphology, and optical properties. Thus, the morphology, surface composition, and optical functional characteristics of AlN/GaAs(100) heterophase systems can be controlled using differently misoriented GaAs(100) substrates.
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Об авторах
P. Seredin
Voronezh State University; Ural Federal University
Автор, ответственный за переписку.
Email: paul@phys.vsu.ru
Россия, Voronezh, 394006; Ekaterinburg, 620002
A. Fedyukin
Voronezh State University
Email: paul@phys.vsu.ru
Россия, Voronezh, 394006
V. Terekhov
Voronezh State University
Email: paul@phys.vsu.ru
Россия, Voronezh, 394006
K. Barkov
Voronezh State University
Email: paul@phys.vsu.ru
Россия, Voronezh, 394006
I. Arsentyev
Ioffe Institute
Email: paul@phys.vsu.ru
Россия, St. Petersburg, 194021
A. Bondarev
Ioffe Institute
Email: paul@phys.vsu.ru
Россия, St. Petersburg, 194021
E. Fomin
Ioffe Institute; St. Petersburg State Electrotechnical University “LETI”
Email: paul@phys.vsu.ru
Россия, St. Petersburg, 194021; St. Petersburg, 197022
N. Pikhtin
Ioffe Institute; St. Petersburg State Electrotechnical University “LETI”
Email: paul@phys.vsu.ru
Россия, St. Petersburg, 194021; St. Petersburg, 197022