Oxygen Nitrogen Mixture Effect on Aluminum Nitride Synthesis by Reactive Ion Plasma Deposition
- 作者: Lubyanskiy Y.1, Bondarev A.1, Soshnikov I.1,2,3, Bert N.1, Zolotarev V.1, Kirilenko D.1, Kotlyar K.2, Pikhtin N.1, Tarasov I.1
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隶属关系:
- Ioffe Institute
- St. Petersburg Academic University—Nanotechnology Research and Education Centre
- Institute for Analytical Instrumentation
- 期: 卷 52, 编号 2 (2018)
- 页面: 184-188
- 栏目: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/202407
- DOI: https://doi.org/10.1134/S1063782618020070
- ID: 202407
如何引用文章
详细
In the work we investigate synthesis of aluminum nitride films using reactive ion plasma deposition in oxygen/nitrogen gas mixture for application as optical elements for power semiconductor lasers. The experimental refractive index of synthesized AlNO films is dependent on oxygen composition and is decreasing in diapason from 1.76 to 2.035 at elevation of the oxygen fraction.It is shown that the AlN films synthesized by pure nitrogen plasma are polycrystalline and textured. The oxygen presence in discharging gas results to growth of amorphous phase of the AlNO film.
作者简介
Ya. Lubyanskiy
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
A. Bondarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
I. Soshnikov
Ioffe Institute; St. Petersburg Academic University—Nanotechnology Research and Education Centre; Institute for Analytical Instrumentation
编辑信件的主要联系方式.
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021; St. Petersburg, 194021; St. Petersburg, 190103
N. Bert
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
V. Zolotarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
D. Kirilenko
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
K. Kotlyar
St. Petersburg Academic University—Nanotechnology Research and Education Centre
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
N. Pikhtin
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021
I. Tarasov
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
俄罗斯联邦, St. Petersburg, 194021