Oxygen Nitrogen Mixture Effect on Aluminum Nitride Synthesis by Reactive Ion Plasma Deposition
- Authors: Lubyanskiy Y.V.1, Bondarev A.D.1, Soshnikov I.P.1,2,3, Bert N.A.1, Zolotarev V.V.1, Kirilenko D.A.1, Kotlyar K.P.2, Pikhtin N.A.1, Tarasov I.S.1
-
Affiliations:
- Ioffe Institute
- St. Petersburg Academic University—Nanotechnology Research and Education Centre
- Institute for Analytical Instrumentation
- Issue: Vol 52, No 2 (2018)
- Pages: 184-188
- Section: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/202407
- DOI: https://doi.org/10.1134/S1063782618020070
- ID: 202407
Cite item
Abstract
In the work we investigate synthesis of aluminum nitride films using reactive ion plasma deposition in oxygen/nitrogen gas mixture for application as optical elements for power semiconductor lasers. The experimental refractive index of synthesized AlNO films is dependent on oxygen composition and is decreasing in diapason from 1.76 to 2.035 at elevation of the oxygen fraction.It is shown that the AlN films synthesized by pure nitrogen plasma are polycrystalline and textured. The oxygen presence in discharging gas results to growth of amorphous phase of the AlNO film.
About the authors
Ya. V. Lubyanskiy
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
A. D. Bondarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
I. P. Soshnikov
Ioffe Institute; St. Petersburg Academic University—Nanotechnology Research and Education Centre; Institute for Analytical Instrumentation
Author for correspondence.
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021; St. Petersburg, 194021; St. Petersburg, 190103
N. A. Bert
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
V. V. Zolotarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
D. A. Kirilenko
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
K. P. Kotlyar
St. Petersburg Academic University—Nanotechnology Research and Education Centre
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
N. A. Pikhtin
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021
I. S. Tarasov
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Russian Federation, St. Petersburg, 194021