Oxygen Nitrogen Mixture Effect on Aluminum Nitride Synthesis by Reactive Ion Plasma Deposition
- Авторлар: Lubyanskiy Y.1, Bondarev A.1, Soshnikov I.1,2,3, Bert N.1, Zolotarev V.1, Kirilenko D.1, Kotlyar K.2, Pikhtin N.1, Tarasov I.1
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Мекемелер:
- Ioffe Institute
- St. Petersburg Academic University—Nanotechnology Research and Education Centre
- Institute for Analytical Instrumentation
- Шығарылым: Том 52, № 2 (2018)
- Беттер: 184-188
- Бөлім: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/202407
- DOI: https://doi.org/10.1134/S1063782618020070
- ID: 202407
Дәйексөз келтіру
Аннотация
In the work we investigate synthesis of aluminum nitride films using reactive ion plasma deposition in oxygen/nitrogen gas mixture for application as optical elements for power semiconductor lasers. The experimental refractive index of synthesized AlNO films is dependent on oxygen composition and is decreasing in diapason from 1.76 to 2.035 at elevation of the oxygen fraction.It is shown that the AlN films synthesized by pure nitrogen plasma are polycrystalline and textured. The oxygen presence in discharging gas results to growth of amorphous phase of the AlNO film.
Авторлар туралы
Ya. Lubyanskiy
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
A. Bondarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
I. Soshnikov
Ioffe Institute; St. Petersburg Academic University—Nanotechnology Research and Education Centre; Institute for Analytical Instrumentation
Хат алмасуға жауапты Автор.
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021; St. Petersburg, 194021; St. Petersburg, 190103
N. Bert
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
V. Zolotarev
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
D. Kirilenko
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
K. Kotlyar
St. Petersburg Academic University—Nanotechnology Research and Education Centre
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
N. Pikhtin
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021
I. Tarasov
Ioffe Institute
Email: ipsosh.beam@mail.ioffer.ru
Ресей, St. Petersburg, 194021