Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates
- 作者: Yunin P.1,2,3, Drozdov Y.1,3, Chernov V.2, Isaev V.2, Bogdanov S.2, Muchnikov A.2
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隶属关系:
- Institute for Physics of Microstructures
- Institute of Applied Physics
- Lobachevsky State University of Nizhny Novgorod
- 期: 卷 50, 编号 12 (2016)
- 页面: 1622-1625
- 栏目: XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/198875
- DOI: https://doi.org/10.1134/S1063782616120289
- ID: 198875
如何引用文章
详细
Methods of the experimental diagnostics and control of the misorientation angle for single-crystal HPHT (High Pressure High Temperature) diamond substrates are discussed. Such substrates are used for the homoepitaxial growth of doped and undoped CVD diamond layers. The formation of singular (001) terraces on the surface of HPHT diamond after microwave-discharge-plasma etching in pure hydrogen or a hydrogen–oxygen mixture is observed. This phenomenon can be used for rapid determination of the substrate misorientation and to improve the control precision of the deviation angle during substrate polishing, or for obtaining large singular (001) areas of single-crystal diamond substrates.
作者简介
P. Yunin
Institute for Physics of Microstructures; Institute of Applied Physics; Lobachevsky State University of Nizhny Novgorod
编辑信件的主要联系方式.
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950; ul. Ul’yanova 46, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950
Yu. Drozdov
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950
V. Chernov
Institute of Applied Physics
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950
V. Isaev
Institute of Applied Physics
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950
S. Bogdanov
Institute of Applied Physics
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950
A. Muchnikov
Institute of Applied Physics
Email: yunin@ipmras.ru
俄罗斯联邦, ul. Ul’yanova 46, Nizhny Novgorod, 603950