Email this article Formation of singular (001) terraces on the surface of single-crystal HPHT diamond substrates
- Authors: Yunin P.A.1,2,3, Drozdov Y.N.1,3, Chernov V.V.2, Isaev V.A.2, Bogdanov S.A.2, Muchnikov A.B.2
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Affiliations:
- Institute for Physics of Microstructures
- Institute of Applied Physics
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 50, No 12 (2016)
- Pages: 1622-1625
- Section: XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/198875
- DOI: https://doi.org/10.1134/S1063782616120289
- ID: 198875
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Abstract
Methods of the experimental diagnostics and control of the misorientation angle for single-crystal HPHT (High Pressure High Temperature) diamond substrates are discussed. Such substrates are used for the homoepitaxial growth of doped and undoped CVD diamond layers. The formation of singular (001) terraces on the surface of HPHT diamond after microwave-discharge-plasma etching in pure hydrogen or a hydrogen–oxygen mixture is observed. This phenomenon can be used for rapid determination of the substrate misorientation and to improve the control precision of the deviation angle during substrate polishing, or for obtaining large singular (001) areas of single-crystal diamond substrates.
About the authors
P. A. Yunin
Institute for Physics of Microstructures; Institute of Applied Physics; Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950; ul. Ul’yanova 46, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950
Yu. N. Drozdov
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950; pr. Gagarina 23, Nizhny Novgorod, 603950
V. V. Chernov
Institute of Applied Physics
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950
V. A. Isaev
Institute of Applied Physics
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950
S. A. Bogdanov
Institute of Applied Physics
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950
A. B. Muchnikov
Institute of Applied Physics
Email: yunin@ipmras.ru
Russian Federation, ul. Ul’yanova 46, Nizhny Novgorod, 603950
