Effect of Ion-Beam Processing during RF Magnetron Sputtering on the properties of ZnO Films
- Авторы: Krylov P.1, Alalykin A.1, Durman E.1, Zakirova R.1, Fedotova I.1
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Учреждения:
- Udmurt State University
- Выпуск: Том 53, № 11 (2019)
- Страницы: 1457-1464
- Раздел: Surfaces, Interfaces, and Thin Films
- URL: https://journals.rcsi.science/1063-7826/article/view/207272
- DOI: https://doi.org/10.1134/S1063782619110095
- ID: 207272
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Аннотация
The effect of ion-beam processing alternating with magnetron sputtering on the properties of zinc-oxide thin films is investigated. It is shown that ion-beam processing reduces the growth rate, coherent-scattering-region sizes, and the resistivity. The stoichiometric index, band gap, and refractive index increase. The transparency of the films in the weak absorption region remains unchanged.
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Об авторах
P. Krylov
Udmurt State University
Автор, ответственный за переписку.
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
A. Alalykin
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
E. Durman
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
R. Zakirova
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
I. Fedotova
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034