Silicon Nanopillar Microarrays: Formation and Resonance Reflection of Light
- Авторы: Basalaeva L.1, Nastaushev Y.1, Dultsev F.1,2, Kryzhanovskaya N.3, Moiseev E.3
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Учреждения:
- Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
- Novosibirsk State University
- St. Petersburg National Research Academic University, Russian Academy of Sciences
- Выпуск: Том 53, № 2 (2019)
- Страницы: 205-209
- Раздел: Semiconductor Structures, Low-Dimensional Systems, and Quantum Phenomena
- URL: https://journals.rcsi.science/1063-7826/article/view/205709
- DOI: https://doi.org/10.1134/S1063782619020027
- ID: 205709
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Аннотация
Abstract—The results of investigating the spectral characteristics of reflection from silicon nanopillar (Si NP) microarrays in the wavelength region from 400 to 1100 nm are presented. The Si nanopillars are formed by electron lithography on a negative resist with subsequent reactive ion etching. The Si nanopillars are etched through a resist mask and SiO2 100 nm thick. In the spectra of reflection from nanopillar microarrays, minima are observed, the position of which depends strongly on the Si nanopillar diameter.
Об авторах
L. Basalaeva
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
Автор, ответственный за переписку.
Email: basalaeva@isp.nsc.ru
Россия, Novosibirsk, 630090
Yu. Nastaushev
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences
Email: basalaeva@isp.nsc.ru
Россия, Novosibirsk, 630090
F. Dultsev
Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences; Novosibirsk State University
Email: basalaeva@isp.nsc.ru
Россия, Novosibirsk, 630090; Novosibirsk, 630090
N. Kryzhanovskaya
St. Petersburg National Research Academic University, Russian Academy of Sciences
Email: basalaeva@isp.nsc.ru
Россия, St. Petersburg, 194021
E. Moiseev
St. Petersburg National Research Academic University, Russian Academy of Sciences
Email: basalaeva@isp.nsc.ru
Россия, St. Petersburg, 194021