Diffusion of interstitial magnesium in dislocation-free silicon
- Авторы: Shuman V.1, Lavrent’ev A.1, Astrov Y.1, Lodygin A.1, Portsel L.1
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Учреждения:
- Ioffe Physical–Technical Institute
- Выпуск: Том 51, № 1 (2017)
- Страницы: 1-3
- Раздел: Nonelectronic Properties of Semiconductors (Atomic Structure, Diffusion)
- URL: https://journals.rcsi.science/1063-7826/article/view/199259
- DOI: https://doi.org/10.1134/S1063782617010237
- ID: 199259
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Аннотация
The diffusion of magnesium impurity in the temperature range T = 600–800°C in dislocation-free single-crystal silicon wafers of p-type conductivity is studied. The surface layer of the wafer doped with magnesium by the ion implantation technique serves as the diffusion source. Implantation is carried out at an ion energy of 150 keV at doses of 5 × 1014 and 2 × 1015 cm–2. The diffusion coefficient of interstitial magnesium donor centers (Di) is determined by measuring the depth of the p–n junction, which is formed in the sample due to annealing during the time t at a given T. As a result of the study, the dependence Di(T) is found for the first time. The data show that the diffusion process occurs mainly by the interstitial mechanism.
Об авторах
V. Shuman
Ioffe Physical–Technical Institute
Автор, ответственный за переписку.
Email: Shuman@mail.ioffe.ru
Россия, St. Petersburg, 194021
A. Lavrent’ev
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Россия, St. Petersburg, 194021
Yu. Astrov
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Россия, St. Petersburg, 194021
A. Lodygin
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Россия, St. Petersburg, 194021
L. Portsel
Ioffe Physical–Technical Institute
Email: Shuman@mail.ioffe.ru
Россия, St. Petersburg, 194021