Effect of energy density on the target on SnO2:Sb film properties when using a high-speed particle separator
- Autores: Parshina L.1, Khramova O.1, Novodvorsky O.1, Lotin A.1, Petukhov I.2, Putilin F.2, Shcherbachev K.3
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Afiliações:
- Institute of Problems of Laser and Information Technologies
- Moscow State University
- National University of Science and Technology “MISIS”
- Edição: Volume 51, Nº 3 (2017)
- Páginas: 407-411
- Seção: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/199675
- DOI: https://doi.org/10.1134/S1063782617030228
- ID: 199675
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Resumo
SnO2:Sb thin films are grown by pulsed laser deposition with high-speed particle separation on quartz-glass substrates without post-deposition annealing under different deposition conditions in the range of the energy densities on the target from 3.4 to 6.8 J/cm2. Their optical, structural, and electrical properties are studied. It is found that the energy density on the target affects the SnO2:Sb film conductivity and transmittance. The optimum conditions of film growth by the droplet-free pulsed laser deposition method are determined. A resistivity minimum of 1.2 × 10–3 Ω cm is observed at an energy density on the target of 4.6 J/cm2, a substrate temperature of 300°C, and an oxygen pressure of 20 mTorr in the vacuum chamber during deposition.
Sobre autores
L. Parshina
Institute of Problems of Laser and Information Technologies
Autor responsável pela correspondência
Email: ParshinaLiubov@mail.ru
Rússia, ul. Svyatoozerskaya 1, Shatura, Moscow oblast, 140700
O. Khramova
Institute of Problems of Laser and Information Technologies
Email: ParshinaLiubov@mail.ru
Rússia, ul. Svyatoozerskaya 1, Shatura, Moscow oblast, 140700
O. Novodvorsky
Institute of Problems of Laser and Information Technologies
Email: ParshinaLiubov@mail.ru
Rússia, ul. Svyatoozerskaya 1, Shatura, Moscow oblast, 140700
A. Lotin
Institute of Problems of Laser and Information Technologies
Email: ParshinaLiubov@mail.ru
Rússia, ul. Svyatoozerskaya 1, Shatura, Moscow oblast, 140700
I. Petukhov
Moscow State University
Email: ParshinaLiubov@mail.ru
Rússia, Moscow, 119991
F. Putilin
Moscow State University
Email: ParshinaLiubov@mail.ru
Rússia, Moscow, 119991
K. Shcherbachev
National University of Science and Technology “MISIS”
Email: ParshinaLiubov@mail.ru
Rússia, Leninskii pr. 4, Moscow, 119049