Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition
- Авторлар: Gromov D.1, Dubkov S.1, Pavlov A.2, Skorik S.3, Trifonov A.4, Kirilenko E.1, Shulyat’ev A.1, Shaman Y.3, Rygalin B.1
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Мекемелер:
- National Research University of Electronic Technology MIET
- Institute of Nanotechnologies of Microelectronics
- Technological Center Research and Production Complex
- Lukin Scientific Research Institute of Physical Problems
- Шығарылым: Том 50, № 13 (2016)
- Беттер: 1748-1752
- Бөлім: Nanotechnology
- URL: https://journals.rcsi.science/1063-7826/article/view/199245
- DOI: https://doi.org/10.1134/S1063782616130042
- ID: 199245
Дәйексөз келтіру
Аннотация
It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.
Негізгі сөздер
Авторлар туралы
D. Gromov
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
S. Dubkov
National Research University of Electronic Technology MIET
Хат алмасуға жауапты Автор.
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
A. Pavlov
Institute of Nanotechnologies of Microelectronics
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
S. Skorik
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
A. Trifonov
Lukin Scientific Research Institute of Physical Problems
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124460
E. Kirilenko
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
A. Shulyat’ev
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
Yu. Shaman
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498
B. Rygalin
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Ресей, Zelenograd, Moscow, 124498