Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition


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详细

It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.

作者简介

D. Gromov

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

S. Dubkov

National Research University of Electronic Technology MIET

编辑信件的主要联系方式.
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

A. Pavlov

Institute of Nanotechnologies of Microelectronics

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

S. Skorik

Technological Center Research and Production Complex

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

A. Trifonov

Lukin Scientific Research Institute of Physical Problems

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124460

E. Kirilenko

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

A. Shulyat’ev

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

Yu. Shaman

Technological Center Research and Production Complex

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498

B. Rygalin

National Research University of Electronic Technology MIET

Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498


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