Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition
- 作者: Gromov D.1, Dubkov S.1, Pavlov A.2, Skorik S.3, Trifonov A.4, Kirilenko E.1, Shulyat’ev A.1, Shaman Y.3, Rygalin B.1
-
隶属关系:
- National Research University of Electronic Technology MIET
- Institute of Nanotechnologies of Microelectronics
- Technological Center Research and Production Complex
- Lukin Scientific Research Institute of Physical Problems
- 期: 卷 50, 编号 13 (2016)
- 页面: 1748-1752
- 栏目: Nanotechnology
- URL: https://journals.rcsi.science/1063-7826/article/view/199245
- DOI: https://doi.org/10.1134/S1063782616130042
- ID: 199245
如何引用文章
详细
It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.
作者简介
D. Gromov
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
S. Dubkov
National Research University of Electronic Technology MIET
编辑信件的主要联系方式.
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Pavlov
Institute of Nanotechnologies of Microelectronics
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
S. Skorik
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Trifonov
Lukin Scientific Research Institute of Physical Problems
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124460
E. Kirilenko
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
A. Shulyat’ev
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
Yu. Shaman
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498
B. Rygalin
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
俄罗斯联邦, Zelenograd, Moscow, 124498