Formation of carbon nanotubes on an amorphous Ni25Ta58N17 alloy film by chemical vapor deposition
- Autores: Gromov D.1, Dubkov S.1, Pavlov A.2, Skorik S.3, Trifonov A.4, Kirilenko E.1, Shulyat’ev A.1, Shaman Y.3, Rygalin B.1
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Afiliações:
- National Research University of Electronic Technology MIET
- Institute of Nanotechnologies of Microelectronics
- Technological Center Research and Production Complex
- Lukin Scientific Research Institute of Physical Problems
- Edição: Volume 50, Nº 13 (2016)
- Páginas: 1748-1752
- Seção: Nanotechnology
- URL: https://journals.rcsi.science/1063-7826/article/view/199245
- DOI: https://doi.org/10.1134/S1063782616130042
- ID: 199245
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Resumo
It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.
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Sobre autores
D. Gromov
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
S. Dubkov
National Research University of Electronic Technology MIET
Autor responsável pela correspondência
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
A. Pavlov
Institute of Nanotechnologies of Microelectronics
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
S. Skorik
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
A. Trifonov
Lukin Scientific Research Institute of Physical Problems
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124460
E. Kirilenko
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
A. Shulyat’ev
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
Yu. Shaman
Technological Center Research and Production Complex
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498
B. Rygalin
National Research University of Electronic Technology MIET
Email: sv.dubkov@gmail.com
Rússia, Zelenograd, Moscow, 124498