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Changes in the Photoluminescence Properties of Semiconductor Heterostructures after Ion-Beam Etching
Levitskii Y.V., Mitrofanov M.I., Voznyuk G.V., Nikolayev D.N., Mizerov M.N., Evtikhiev V.P.
Etching of Disc and Ring Patterns in Si3N4/GaN Structure by Ga+ FIB
Mitrofanov M.I., Voznyuk G.V., Rodin S.N., Lundin W.V., Evtikhiev V.P., Tsatsulnikov A.F.
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