Technological Processes and Routes

Issue Title File
Vol 53, No 15 (2019) Mathematical Model of the Evaporation of Amalgam Components in Discharge Radiation Sources PDF
(Eng)
Petrenko N.Y., Puchnina S.V., Gavrilov S.A.
Vol 53, No 15 (2019) Predicting the Conditions for the Vapor-Phase Epitaxy of the III–V Compounds PDF
(Eng)
Vigdorovich E.N.
Vol 53, No 15 (2019) Influence of the Metallization Composition and Annealing Process Parameters on the Resistance of Ohmic Contacts to n-type 6H-SiC PDF
(Eng)
Egorkin V.I., Zemlyakov V.E., Nezhentsev A.V., Gudkov V.A., Garmash V.I.
Vol 53, No 15 (2019) Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques PDF
(Eng)
Fedotov S.D., Sokolov E.M., Statsenko V.N., Romashkin A.V., Timoshenkov S.P.
Vol 53, No 15 (2019) Study of the Formation Process of Memristor Structures Based on Copper Sulfide PDF
(Eng)
Belov A.N., Golishnikov A.A., Mastinin A.M., Perevalov A.A., Shevyakov V.I.
Vol 52, No 15 (2018) Dependence of Mechanical Stresses in Silicon Nitride Films on the Mode of Plasma-Enhanced Chemical Vapor Deposition PDF
(Eng)
Novak A.V., Novak V.R., Dedkova A.A., Gusev E.E.
Vol 52, No 15 (2018) Using Combined Optical Techniques to Control the Shallow Etching Process PDF
(Eng)
Volokhovskiy A.D., Gerasimenko N.N., Petrakov D.S.
Vol 52, No 15 (2018) Characteristics of Amorphous As2S3 Semiconductor Films Obtained via Spin Coating PDF
(Eng)
Hang Thi Nguyen ., Yakubov A.O., Lazarenko P.I., Volkova A.V., Sherchenkov A.A., Kozyukhin S.A.
Vol 52, No 15 (2018) Investigating the RTA Treatment of Ohmic Contacts to n-Layers of Heterobipolar Nanoheterostructures PDF
(Eng)
Egorkin V.I., Zemlyakov V.E., Nezhentsev A.V., Garmash V.I.
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