Atomic composition and electrical characteristics of epitaxial CVD diamond layers doped with boron

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The results of analysis of the atomic composition, doping level, and hole mobility in epitaxial diamond layers when doped with boron are reported. The layers are produced by chemical-vapor deposition. The possibilities of uniform doping with boron to a level in the range 5 × 1017 to ~1020 at cm–3 and of δ doping to the surface concentration (0.3–5) × 1013 at cm–3 are shown. The conditions for precision ion etching of the structures are determined, and barrier and ohmic contacts to the layers are formed.

作者简介

E. Surovegina

Institute for Physics of Microstructures

编辑信件的主要联系方式.
Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

E. Demidov

Institute for Physics of Microstructures

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

M. Drozdov

Institute for Physics of Microstructures

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

A. Murel

Institute for Physics of Microstructures

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

O. Khrykin

Institute for Physics of Microstructures

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

V. Shashkin

Institute for Physics of Microstructures

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 607680

M. Lobaev

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

A. Gorbachev

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

A. Viharev

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

S. Bogdanov

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

V. Isaev

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

A. Muchnikov

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

V. Chernov

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

D. Radishchev

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

D. Batler

Institute of Applied Physics

Email: suroveginaka@ipmras.ru
俄罗斯联邦, Nizhny Novgorod, 603950

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