Study of the structures of cleaved cross sections by Raman spectroscopy
- Authors: Plankina S.M.1, Vikhrova O.V.2, Danilov Y.A.1, Zvonkov B.N.2, Konnova N.Y.1, Nezhdanov A.V.1, Pashenkin I.Y.1
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Affiliations:
- Lobachevsky State University of Nizhny Novgorod
- Physical–Technical Research Institute
- Issue: Vol 50, No 11 (2016)
- Pages: 1539-1542
- Section: XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/198637
- DOI: https://doi.org/10.1134/S106378261611021X
- ID: 198637
Cite item
Abstract
Scanning confocal Raman spectroscopy is used to study the crystal structure of GaAs irradiated with Mn+ ions with subsequent pulse laser annealing. The scanning of cleaved cross sections of samples shows that the structure completely recovers over the depth of implantation after the annealing. Scattering in the coupled phonon–plasmon mode is revealed, which is indicative of electrical activation of the impurity at Mn doses above 1 × 1016 cm–2. The study shows the possibilities of using scanning confocal Raman spectroscopy in investigations of cleaved cross sections of structures. Using a test structure with a single δ-doped C layer, we show that the lateral resolution of the technique is 300 nm.
About the authors
S. M. Plankina
Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
O. V. Vikhrova
Physical–Technical Research Institute
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
Yu. A. Danilov
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
B. N. Zvonkov
Physical–Technical Research Institute
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
N. Yu. Konnova
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
A. V. Nezhdanov
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
I. Yu. Pashenkin
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950