Study of the structures of cleaved cross sections by Raman spectroscopy
- Авторы: Plankina S.1, Vikhrova O.2, Danilov Y.1, Zvonkov B.2, Konnova N.1, Nezhdanov A.1, Pashenkin I.1
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Учреждения:
- Lobachevsky State University of Nizhny Novgorod
- Physical–Technical Research Institute
- Выпуск: Том 50, № 11 (2016)
- Страницы: 1539-1542
- Раздел: XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/198637
- DOI: https://doi.org/10.1134/S106378261611021X
- ID: 198637
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Аннотация
Scanning confocal Raman spectroscopy is used to study the crystal structure of GaAs irradiated with Mn+ ions with subsequent pulse laser annealing. The scanning of cleaved cross sections of samples shows that the structure completely recovers over the depth of implantation after the annealing. Scattering in the coupled phonon–plasmon mode is revealed, which is indicative of electrical activation of the impurity at Mn doses above 1 × 1016 cm–2. The study shows the possibilities of using scanning confocal Raman spectroscopy in investigations of cleaved cross sections of structures. Using a test structure with a single δ-doped C layer, we show that the lateral resolution of the technique is 300 nm.
Об авторах
S. Plankina
Lobachevsky State University of Nizhny Novgorod
Автор, ответственный за переписку.
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
O. Vikhrova
Physical–Technical Research Institute
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
Yu. Danilov
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
B. Zvonkov
Physical–Technical Research Institute
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
N. Konnova
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
A. Nezhdanov
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950
I. Pashenkin
Lobachevsky State University of Nizhny Novgorod
Email: plankina@phys.unn.ru
Россия, Nizhny Novgorod, 603950