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On the Effect of the Crystal Structure in the Sputtering of Two-Component Single-Crystal Structures
Samoilov V.N., Ananieva N.G.
Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions
Belykh S.F., Bekkerman A.D., Tolstogouzov A.B., Lozovan A.A., Fu D.J.
A Comment on the Computer Simulation Program SRIM
Shulga V.I.
Simulation of the interaction of free Cu–Bi clusters with low-energy single atoms and clusters of argon
Shyrokorad D.V., Kornich G.V., Buga S.G.
Effective sputtering yields of titanium, titanium nitride, and molybdenum induced by nitrogen ions and ions of nitrogen-oxygen mixtures
Dukhopel’nikov D.V., Riazanov V.A., Vorob’ev E.V., Abgarian V.K., Popov G.A., Khartov S.A.
Excitation Energies of VnOm+ and NbnOm+ Clusters Sputtered under Ion Bombardment
Dzhemilev N.K., Kovalenko S.F., Maksimov S.E., Tukfatullin O.F., Khojiev S.T.
Depth of origin of sputtered particles under the oblique incidence of a primary ion beam
Pustovit A.N.
Modeling of cathode sputtering in a low-current gas discharge in a mixture of argon with mercury vapor
Kristya V.I., Savichkin D.O., Fisher M.R.
Study of the Influence of Implanted Atoms on the Coefficients of the Sputtering of Silicon and Silicon with a Thin Oxide Film
Tashmukhamedova D.A., Yusupjanova M.B., Tashatov A.K., Umirzakov B.E.
Pulsed magnetron sputtering and ion-induced annealing of carbon films
Shevchenko E.F., Sysoev I.A., Prucnal S., Frenzel K.
Emission theory of amorphous-material sputtering. Energy dependence of the sputtering coefficient
Pustovit A.N.
Modeling of the glow discharge cathode sheath and the cathode surface sputtering in a mixture of argon with mercury vapor
Dubinina M.S., Savichkin D.O., Fisher M.R., Kristya V.I.
Simulation of Redeposited Silicon Sputtering under Focused Ion Beam Irradiation
Borgardt N.I., Volkov R.L., Rumyantsev A.V.
Analysis of TiAlSiN coatings deposited by reactive magnetron sputtering under high-current ion assistance
Gavrilov N.V., Kamenetskikh A.S., Chukin A.V.
Influence of surface corrugation on the sputtering of carbon materials under high-fluence ion bombardment
Andrianova N.N., Borisov A.M., Mashkova E.S., Shulga V.I.
Monte Carlo Simulation of the Ion and Fast Atom Energy Spectra at the Cathode Surface in Low-Current Discharge in a Mixture of Argon with Mercury Vapor
Savichkin D.O., Kristya V.I.
On the Trapping and Retention of Hydrogen Isotopes in Graphite under Sequential Hydrogen Plasma Irradiation
Ayrapetov A.A., Begrambekov L.B., Dovganyuk S.S., Kaplevsky A.S.
Effect of concurrent electron irradiation on the structure of deposited carbon films
Korshunov S.N., Martynenko Y.V., Belova N.E., Skorlupkin I.D.
Effect of Ion Bombardment on the Density of States of Valence Electrons in CdS Films
Umirzakov B.E., Tashmukhamedova D.A., Rabbimov E.M., Sodikjanov J.S., Urokov A.N.
Structure Changes in Carbon Films Prepared by Electron-Beam-Assisted Deposition
Korshunov S.N., Lebedev A.M., Martynenko Y.V., Svechnikov N.Y., Skorlupkin I.D.
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