A Comment on the Computer Simulation Program SRIM

Abstract

The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1–10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.