Отправить статью по E-mail Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions
- Авторы: Belykh S.F.1, Bekkerman A.D.2, Tolstogouzov A.B.3,4, Lozovan A.A.1, Fu D.J.5
-
Учреждения:
- Moscow Aviation Institute (National Research University)
- Schulich Faculty of Chemistry
- Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia
- Ryazan State Radio Engineering University
- Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and Technology
- Выпуск: Том 12, № 1 (2018)
- Страницы: 33-37
- Раздел: Article
- URL: https://journals.rcsi.science/1027-4510/article/view/194717
- DOI: https://doi.org/10.1134/S1027451018010056
- ID: 194717
Цитировать
Открытый доступ
Доступ предоставлен
Только для подписчиков
Аннотация
The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.
Об авторах
S. Belykh
Moscow Aviation Institute (National Research University)
Автор, ответственный за переписку.
Email: serolg@rambler.ru
Россия, Moscow, 109383
A. Bekkerman
Schulich Faculty of Chemistry
Email: serolg@rambler.ru
Израиль, Haifa, 32000
A. Tolstogouzov
Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia; Ryazan State Radio Engineering University
Email: serolg@rambler.ru
Португалия, Caparica, 2829-516; Ryazan, 390005
A. Lozovan
Moscow Aviation Institute (National Research University)
Email: serolg@rambler.ru
Россия, Moscow, 109383
D. Fu
Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and Technology
Email: serolg@rambler.ru
Китай, Wuhan, 430072
Дополнительные файлы
