Effective sputtering yields of titanium, titanium nitride, and molybdenum induced by nitrogen ions and ions of nitrogen-oxygen mixtures

Abstract

This work is dedicated to studying the effects of nitrogen ions and ions of nitrogen and oxygen mixtures on the surface of titanium, titanium nitride, and molybdenum. The usage of magnetron sputtering systems as a model device to study the effect of reactive gases on elements of electric jet engines is proposed and justified. The processes of sputtering of a surface exposed to non-monoenergetic ion beams are studied. The effective sputtering yields of titanium, titanium nitride, and molybdenum induced by argon and nitrogen ions and ions of nitrogen-oxygen mixtures at various intermediate-energy ion beams are determined. It is shown that the sputtering yields of reactive-gas ions are significantly lower than the sputtering yields of inert gases.