Photodetectors with an InGaAs Active Region and InGaP Metamorphic Buffer Layer Grown on GaAs Substrates
- 作者: Samartsev I.1, Nekorkin S.1, Zvonkov B.1, Aleshkin V.2, Dubinov A.2, Pashenkin I.1,2, Dikareva N.1, Chigineva A.1
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隶属关系:
- Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
- Institute for Physics of Microstructures, Russian Academy of Sciences
- 期: 卷 52, 编号 12 (2018)
- 页面: 1564-1567
- 栏目: Xxii International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 12–15, 2018
- URL: https://journals.rcsi.science/1063-7826/article/view/204710
- DOI: https://doi.org/10.1134/S1063782618120205
- ID: 204710
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详细
The results of studying the reverse dark currents of photodiodes for a wavelength of 1.06 μm grown on a GaAs substrate with the help of an InGaP metamorphic buffer layer are presented. The metalorganic chemical vapor epitaxy (MOCVD) growth technology of InGaP metamorphic buffer layers with a stepwise composition variation is developed. Photodiodes with a photosensitive area of 1 mm in diameter and radiation input through the substrate are fabricated. The photodiode dark current at room temperature and reverse bias of –3 V was 50 nA. It is assumed that the bulk component of the dark current is caused by the tunneling mechanism through the trap levels.
作者简介
I. Samartsev
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
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俄罗斯联邦, Nizhny Novgorod, 603950
S. Nekorkin
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
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俄罗斯联邦, Nizhny Novgorod, 603950
B. Zvonkov
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
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俄罗斯联邦, Nizhny Novgorod, 603950
V. Aleshkin
Institute for Physics of Microstructures, Russian Academy of Sciences
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俄罗斯联邦, Nizhny Novgorod, 607680
A. Dubinov
Institute for Physics of Microstructures, Russian Academy of Sciences
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俄罗斯联邦, Nizhny Novgorod, 607680
I. Pashenkin
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod; Institute for Physics of Microstructures, Russian Academy of Sciences
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俄罗斯联邦, Nizhny Novgorod, 603950; Nizhny Novgorod, 607680
N. Dikareva
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
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俄罗斯联邦, Nizhny Novgorod, 603950
A. Chigineva
Physical Technical Research Institute, Lobachevsky State University of Nizhny Novgorod
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俄罗斯联邦, Nizhny Novgorod, 603950