Fabrication of Silicon Nanostructures for Application in Photonics
- 作者: Kamalieva A.1, Toropov N.1, Vartanyan T.1, Baranov M.1, Parfenov P.1, Bogdanov K.1, Zharova Y.1,2, Tolmachev V.2
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隶属关系:
- ITMO University
- Ioffe Institute
- 期: 卷 52, 编号 5 (2018)
- 页面: 632-635
- 栏目: XXV International Symposium “Nanostructures: Physics and Technology”, Saint Petersburg, Russia, June 26–30, 2017. Nanostructure Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/203244
- DOI: https://doi.org/10.1134/S1063782618050135
- ID: 203244
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详细
Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.
作者简介
A. Kamalieva
ITMO University
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
N. Toropov
ITMO University
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
T. Vartanyan
ITMO University
编辑信件的主要联系方式.
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
M. Baranov
ITMO University
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
P. Parfenov
ITMO University
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
K. Bogdanov
ITMO University
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101
Y. Zharova
ITMO University; Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 197101; St. Petersburg, 194021
V. Tolmachev
Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
俄罗斯联邦, St. Petersburg, 194021