Fabrication of Silicon Nanostructures for Application in Photonics
- Authors: Kamalieva A.N.1, Toropov N.A.1, Vartanyan T.A.1, Baranov M.A.1, Parfenov P.S.1, Bogdanov K.V.1, Zharova Y.A.1,2, Tolmachev V.A.2
-
Affiliations:
- ITMO University
- Ioffe Institute
- Issue: Vol 52, No 5 (2018)
- Pages: 632-635
- Section: XXV International Symposium “Nanostructures: Physics and Technology”, Saint Petersburg, Russia, June 26–30, 2017. Nanostructure Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/203244
- DOI: https://doi.org/10.1134/S1063782618050135
- ID: 203244
Cite item
Abstract
Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.
About the authors
A. N. Kamalieva
ITMO University
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
N. A. Toropov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
T. A. Vartanyan
ITMO University
Author for correspondence.
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
M. A. Baranov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
P. S. Parfenov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
K. V. Bogdanov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101
Y. A. Zharova
ITMO University; Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 197101; St. Petersburg, 194021
V. A. Tolmachev
Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
Russian Federation, St. Petersburg, 194021