Fabrication of Silicon Nanostructures for Application in Photonics
- Авторлар: Kamalieva A.1, Toropov N.1, Vartanyan T.1, Baranov M.1, Parfenov P.1, Bogdanov K.1, Zharova Y.1,2, Tolmachev V.2
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Мекемелер:
- ITMO University
- Ioffe Institute
- Шығарылым: Том 52, № 5 (2018)
- Беттер: 632-635
- Бөлім: XXV International Symposium “Nanostructures: Physics and Technology”, Saint Petersburg, Russia, June 26–30, 2017. Nanostructure Technology
- URL: https://journals.rcsi.science/1063-7826/article/view/203244
- DOI: https://doi.org/10.1134/S1063782618050135
- ID: 203244
Дәйексөз келтіру
Аннотация
Silicon is the primary material of modern electronics. It also possesses bright potentials for applications in nanophotonics. At the same time optical properties of bulk silicon do not fully satisfy requirements imposed on them. Fortunately, properties of silicon nanostructures strongly depend on their shapes and sizes. In this regard, of special interest is the development of fabrication and post-processing methods of silicon nanostructures. In this contribution we propose a method for silicon nanostructures fabrication combining the technique of high-vacuum deposition with metal-assisted chemical etching. SEM images as well as ellipsometry, Raman scattering and optical spectroscopy data prove that the desired structural changes were obtained.
Авторлар туралы
A. Kamalieva
ITMO University
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
N. Toropov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
T. Vartanyan
ITMO University
Хат алмасуға жауапты Автор.
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
M. Baranov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
P. Parfenov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
K. Bogdanov
ITMO University
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101
Y. Zharova
ITMO University; Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 197101; St. Petersburg, 194021
V. Tolmachev
Ioffe Institute
Email: Tigran.Vartanyan@mail.ru
Ресей, St. Petersburg, 194021