Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering
- 作者: Kobziev V.1, Zakirova R.1, Kostenkov N.1, Krylov P.1, Fedotova I.1
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隶属关系:
- Udmurt State University
- 期: 卷 51, 编号 6 (2017)
- 页面: 817-822
- 栏目: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/200110
- DOI: https://doi.org/10.1134/S1063782617060161
- ID: 200110
如何引用文章
详细
The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.
作者简介
V. Kobziev
Udmurt State University
Email: ftt@udsu.ru
俄罗斯联邦, Izhevsk, 426034
R. Zakirova
Udmurt State University
Email: ftt@udsu.ru
俄罗斯联邦, Izhevsk, 426034
N. Kostenkov
Udmurt State University
Email: ftt@udsu.ru
俄罗斯联邦, Izhevsk, 426034
P. Krylov
Udmurt State University
编辑信件的主要联系方式.
Email: ftt@udsu.ru
俄罗斯联邦, Izhevsk, 426034
I. Fedotova
Udmurt State University
Email: ftt@udsu.ru
俄罗斯联邦, Izhevsk, 426034