Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering
- Authors: Kobziev V.F.1, Zakirova R.M.1, Kostenkov N.V.1, Krylov P.N.1, Fedotova I.V.1
-
Affiliations:
- Udmurt State University
- Issue: Vol 51, No 6 (2017)
- Pages: 817-822
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/200110
- DOI: https://doi.org/10.1134/S1063782617060161
- ID: 200110
Cite item
Abstract
The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.
About the authors
V. F. Kobziev
Udmurt State University
Email: ftt@udsu.ru
Russian Federation, Izhevsk, 426034
R. M. Zakirova
Udmurt State University
Email: ftt@udsu.ru
Russian Federation, Izhevsk, 426034
N. V. Kostenkov
Udmurt State University
Email: ftt@udsu.ru
Russian Federation, Izhevsk, 426034
P. N. Krylov
Udmurt State University
Author for correspondence.
Email: ftt@udsu.ru
Russian Federation, Izhevsk, 426034
I. V. Fedotova
Udmurt State University
Email: ftt@udsu.ru
Russian Federation, Izhevsk, 426034