Effect of deposition temperature on the structure and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering
- Авторы: Kobziev V.1, Zakirova R.1, Kostenkov N.1, Krylov P.1, Fedotova I.1
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Учреждения:
- Udmurt State University
- Выпуск: Том 51, № 6 (2017)
- Страницы: 817-822
- Раздел: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/200110
- DOI: https://doi.org/10.1134/S1063782617060161
- ID: 200110
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Аннотация
The effect of the condensation temperature on the growth rate, structure, and optical properties of zinc-selenide films produced by radio-frequency magnetron sputtering is studied. As the deposition temperature is increased, the film thickness decreases. Polycrystalline zinc-selenide films consist of a mixture of cubic and hexagonal phases, of which the cubic phase is dominant. A correlation between the refractive index and the crystallite size is shown.
Об авторах
V. Kobziev
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
R. Zakirova
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
N. Kostenkov
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
P. Krylov
Udmurt State University
Автор, ответственный за переписку.
Email: ftt@udsu.ru
Россия, Izhevsk, 426034
I. Fedotova
Udmurt State University
Email: ftt@udsu.ru
Россия, Izhevsk, 426034