Influence of surface roughness on a change in the growth mode from two-dimensional to three-dimensional for strained SiGe heterostructures
- Авторы: Novikov A.1,2, Shaleev M.1, Yurasov D.1,2, Yunin P.1,2
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Учреждения:
- Institute for Physics of Microstructures
- Lobachevsky State University of Nizhny Novgorod (NNSU)
- Выпуск: Том 50, № 12 (2016)
- Страницы: 1630-1634
- Раздел: XX International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 14–18, 2016
- URL: https://journals.rcsi.science/1063-7826/article/view/198913
- DOI: https://doi.org/10.1134/S1063782616120137
- ID: 198913
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Аннотация
The influence of the surface microroughness on the critical thickness for the two-dimensional growth of strained SiGe structures on Si(001) and Ge(001) substrates is investigated. A decrease in the critical thickness for the two-dimensional growth of Ge films with increasing number of lattice periods or a decrease in the thickness of Si spacer layers is found for Ge/Si lattices grown on Si(001) substrates. This change is related to an increase in the surface roughness with the accumulation of elastic energy in compressed structures. A comparative study of the growth of SiGe structures on Si(001) and Ge(001) substrates shows that the critical thickness for the two-dimensional growth of tensile-strained layers is much larger than for compressed layers in a wide range of SiGe-layer compositions at an identical (in magnitude) lattice mismatch between the film and substrate.
Об авторах
A. Novikov
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod (NNSU)
Автор, ответственный за переписку.
Email: anov@ipmras.ru
Россия, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
M. Shaleev
Institute for Physics of Microstructures
Email: anov@ipmras.ru
Россия, Nizhny Novgorod, 603950
D. Yurasov
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod (NNSU)
Email: anov@ipmras.ru
Россия, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
P. Yunin
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod (NNSU)
Email: anov@ipmras.ru
Россия, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950