Possibility of the use of intermediate carbidsiliconoxide nanolayers on polydiamond substrates for gallium nitride layers epitaxy
- Авторы: Averichkin P.1, Donskov A.1, Dukhnovsky M.2, Knyazev S.1, Kozlova Y.3, Yugova T.1, Belogorokhov I.1
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Учреждения:
- State Research and Design Institute of Rare-Metal Industry Giredmet AO
- R & D Enterprise Istok
- Institute for Nuclear Research
- Выпуск: Том 50, № 4 (2016)
- Страницы: 555-558
- Раздел: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/197034
- DOI: https://doi.org/10.1134/S1063782616040047
- ID: 197034
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Аннотация
The results of using carbidsiliconoxide (a-C:SiO1.5) films with a thickness of 30–60 nm, produced by the pyrolysis annealing of oligomethylsilseskvioksana (CH3–SiO1.5)n with cyclolinear (staircased) molecular structure, as intermediate films in the hydride vapor phase epitaxy of gallium nitride on polycrystalline CVD-diamond substrates are presented. In the pyrolysis annealing of (CH3–SiO1.5)n films in an atmosphere of nitrogen at a temperature of 1060°C, methyl radicals are carbonized to yield carbon atoms chemically bound to silicon. In turn, these atoms form a SiC monolayer on the surface of a-C:SiO1.5 films via covalent bonding with silicon. It is shown that GaN islands grow on such an intermediate layer on CVD-polydiamond substrates in the process of hydride vapor phase epitaxy in a vertical reactor from the GaCl–NH3–N2 gas mixture.
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Об авторах
P. Averichkin
State Research and Design Institute of Rare-Metal Industry Giredmet AO
Автор, ответственный за переписку.
Email: P_Yugov@mail.ru
Россия, Moscow, 119017
A. Donskov
State Research and Design Institute of Rare-Metal Industry Giredmet AO
Email: P_Yugov@mail.ru
Россия, Moscow, 119017
M. Dukhnovsky
R & D Enterprise Istok
Email: P_Yugov@mail.ru
Россия, Fryazino, Moscow oblast, 141190
S. Knyazev
State Research and Design Institute of Rare-Metal Industry Giredmet AO
Email: P_Yugov@mail.ru
Россия, Moscow, 119017
Yu. Kozlova
Institute for Nuclear Research
Email: P_Yugov@mail.ru
Россия, Moscow, 117315
T. Yugova
State Research and Design Institute of Rare-Metal Industry Giredmet AO
Email: P_Yugov@mail.ru
Россия, Moscow, 119017
I. Belogorokhov
State Research and Design Institute of Rare-Metal Industry Giredmet AO
Email: P_Yugov@mail.ru
Россия, Moscow, 119017