Effect of the Temperature of Photonic Annealing on the Structural and Optical Properties of ZnO Films Synthesized by Dual Magnetron-Assisted Sputtering
- Authors: Zaitsev S.V.1, Vaschilin V.S.1, Kolesnik V.V.1, Limarenko M.V.1, Prokhorenkov D.S.1, Evtushenko E.I.1
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Affiliations:
- Belgorod State Technological University
- Issue: Vol 53, No 2 (2019)
- Pages: 255-259
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/205768
- DOI: https://doi.org/10.1134/S106378261902026X
- ID: 205768
Cite item
Abstract
Zinc-oxide films 1.4 μm in thickness are deposited onto glassy substrates by the dual magnetron-assisted sputtering of zinc targets in an argon and oxygen gas atmosphere. The dependences of the structural and optical characteristics of the ZnO films on the temperature of postdeposition photonic annealing are studied. It is established that an increase in the annealing temperature yields an increase in the degree of crystallinity of the films. Electron microscopy shows that the deposited ZnO coatings are columnar in structure and the microstructure density and crystallite size increase upon annealing. It is found that, at an annealing temperature of 450–650°C, the optical transmittance increases to >90% in the spectral range 400–1100 nm. The experimental results show that the temperature of vacuum photonic annealing has the most profound effect on the final properties of ZnO coatings.
About the authors
S. V. Zaitsev
Belgorod State Technological University
Author for correspondence.
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012
V. S. Vaschilin
Belgorod State Technological University
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012
V. V. Kolesnik
Belgorod State Technological University
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012
M. V. Limarenko
Belgorod State Technological University
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012
D. S. Prokhorenkov
Belgorod State Technological University
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012
E. I. Evtushenko
Belgorod State Technological University
Email: sergey-za@mail.ru
Russian Federation, Belgorod, 308012