Effect of the Temperature of Photonic Annealing on the Structural and Optical Properties of ZnO Films Synthesized by Dual Magnetron-Assisted Sputtering
- Авторлар: Zaitsev S.1, Vaschilin V.1, Kolesnik V.1, Limarenko M.1, Prokhorenkov D.1, Evtushenko E.1
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Мекемелер:
- Belgorod State Technological University
- Шығарылым: Том 53, № 2 (2019)
- Беттер: 255-259
- Бөлім: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/205768
- DOI: https://doi.org/10.1134/S106378261902026X
- ID: 205768
Дәйексөз келтіру
Аннотация
Zinc-oxide films 1.4 μm in thickness are deposited onto glassy substrates by the dual magnetron-assisted sputtering of zinc targets in an argon and oxygen gas atmosphere. The dependences of the structural and optical characteristics of the ZnO films on the temperature of postdeposition photonic annealing are studied. It is established that an increase in the annealing temperature yields an increase in the degree of crystallinity of the films. Electron microscopy shows that the deposited ZnO coatings are columnar in structure and the microstructure density and crystallite size increase upon annealing. It is found that, at an annealing temperature of 450–650°C, the optical transmittance increases to >90% in the spectral range 400–1100 nm. The experimental results show that the temperature of vacuum photonic annealing has the most profound effect on the final properties of ZnO coatings.
Авторлар туралы
S. Zaitsev
Belgorod State Technological University
Хат алмасуға жауапты Автор.
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012
V. Vaschilin
Belgorod State Technological University
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012
V. Kolesnik
Belgorod State Technological University
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012
M. Limarenko
Belgorod State Technological University
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012
D. Prokhorenkov
Belgorod State Technological University
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012
E. Evtushenko
Belgorod State Technological University
Email: sergey-za@mail.ru
Ресей, Belgorod, 308012