Tunnel Diodes Based on n+-Ge/p+-Si(001) Epitaxial Structures Grown by the Hot-Wire Chemical Vapor Deposition
- Authors: Shengurov V.G.1, Filatov D.O.1, Denisov S.A.1, Chalkov V.Y.1, Alyabina N.A.1, Zaitsev A.V.1
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Affiliations:
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 53, No 9 (2019)
- Pages: 1238-1241
- Section: Xxiii International Symposium “Nanophysics and Nanoelectronics”, Nizhny Novgorod, March 11–14, 2019
- URL: https://journals.rcsi.science/1063-7826/article/view/206889
- DOI: https://doi.org/10.1134/S1063782619090203
- ID: 206889
Cite item
Abstract
n+-Ge/p+-Si(001) epitaxial structures are grown by hot-wire chemical vapor deposition from GeH4 at a low substrate temperature (~325°C). Prototype tunnel diodes allowing for monolithic integration into Si-based integrated circuits are formed based on these structures. Doping of the n+-Ge layers with a donor impurity (P) to a concentration of >1 × 1019 cm–3 is performed via the thermal decomposition of GaP. Distinct regions of the negative differential resistance are observed in the current–voltage characteristics of tunnel diodes.
About the authors
V. G. Shengurov
Lobachevsky State University of Nizhny Novgorod
Author for correspondence.
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
D. O. Filatov
Lobachevsky State University of Nizhny Novgorod
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
S. A. Denisov
Lobachevsky State University of Nizhny Novgorod
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
V. Yu. Chalkov
Lobachevsky State University of Nizhny Novgorod
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
N. A. Alyabina
Lobachevsky State University of Nizhny Novgorod
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950
A. V. Zaitsev
Lobachevsky State University of Nizhny Novgorod
Email: shengurov@phys.unn.ru
Russian Federation, Nizhny Novgorod, 603950