Sensing Amorphous/Crystalline Silicon Surface Passivation by Attenuated Total Reflection Infrared Spectroscopy of Amorphous Silicon on Glass
- Authors: Abolmasov S.N.1, Abramov A.S.1,2, Semenov A.V.1, Shakhray I.S.3, Terukov E.I.1,2,4, Malchukova E.V.2, Trapeznikova I.N.2
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Affiliations:
- R and D Center of Thin Film Technologies in Energetics
- Ioffe Physicotechnical Institute
- Hevel LLC
- Saint-Petersburg Electrotechnical University
- Issue: Vol 53, No 8 (2019)
- Pages: 1114-1119
- Section: Physics of Semiconductor Devices
- URL: https://journals.rcsi.science/1063-7826/article/view/206672
- DOI: https://doi.org/10.1134/S1063782619080244
- ID: 206672
Cite item
Abstract
Attenuated total reflection Fourier transform infrared (ATR FTIR) spectroscopy and effective lifetime measurements have been used to characterize amorphous/crystalline silicon surface passivation in silicon heterojunction solar cells. The comparative studies show a strong link between microstructure factor R* and effective lifetime of amorphous silicon (a-Si:H) passivation layers incorporating an interface buffer layer, which prevents the epitaxial growth. It is demonstrated that thin a-Si:H films deposited on glass can be used as ATR substrates in this case. The obtained results show that a-Si:H films with R* close to 0.1 are required for manufacturing of high-efficiency (>23%) silicon heterojunction solar cells.
About the authors
S. N. Abolmasov
R and D Center of Thin Film Technologies in Energetics
Author for correspondence.
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194064
A. S. Abramov
R and D Center of Thin Film Technologies in Energetics; Ioffe Physicotechnical Institute
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194064; St. Petersburg, 194021
A. V. Semenov
R and D Center of Thin Film Technologies in Energetics
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194064
I. S. Shakhray
Hevel LLC
Email: s.abolmasov@hevelsolar.com
Russian Federation, Moscow, 117342
E. I. Terukov
R and D Center of Thin Film Technologies in Energetics; Ioffe Physicotechnical Institute; Saint-Petersburg Electrotechnical University
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194064; St. Petersburg, 194021; St. Petersburg, 197376
E. V. Malchukova
Ioffe Physicotechnical Institute
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194021
I. N. Trapeznikova
Ioffe Physicotechnical Institute
Email: s.abolmasov@hevelsolar.com
Russian Federation, St. Petersburg, 194021