MBE AlGaN/GaN HEMT Heterostructures with Optimized AlN Buffer on Al2O3
- Authors: Lutsenko E.V.1, Rzheutski M.V.1, Vainilovich A.G.1, Svitsiankou I.E.1, Shulenkova V.A.1, Muravitskaya E.V.1, Alexeev A.N.2, Petrov S.I.2, Yablonskii G.P.1
-
Affiliations:
- Stepanov Institute of Physics of National Academy of Sciences of Belarus
- SemiTEq JSC
- Issue: Vol 52, No 16 (2018)
- Pages: 2107-2110
- Section: 26th INTERNATIONAL SYMPOSIUM “NANOSTRUCTURES: PHYSICS AND TECHNOLOGY”. NANOSTRUCTURE TECHNOLOGY
- URL: https://journals.rcsi.science/1063-7826/article/view/205411
- DOI: https://doi.org/10.1134/S1063782618160170
- ID: 205411
Cite item
Abstract
The effect of molecular-beam epitaxy (MBE) growth conditions on properties of AlN epitaxial layers was investigated resulting in determination of optimal substrate temperature and ammonia flow. Optimal substrate temperature for growth of GaN and AlGaN layers was determined analyzing thermal decomposition rate of GaN. Based on the information, high electron mobility transistor heterostructures were grown on sapphire substrates using both ammonia and combined plasma-assisted/ammonia MBE modes. The highest achieved 2DEG mobility was 1992 cm2/(V s) (at 2DEG density of 1.17 × 1013 cm–2) which is the current state-of-the-art level.
About the authors
E. V. Lutsenko
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Author for correspondence.
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
M. V. Rzheutski
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
A. G. Vainilovich
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
I. E. Svitsiankou
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
V. A. Shulenkova
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
E. V. Muravitskaya
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072
A. N. Alexeev
SemiTEq JSC
Email: e.lutsenko@ifanbel.bas-net.by
Russian Federation, Saint-Petersburg, 194156
S. I. Petrov
SemiTEq JSC
Email: e.lutsenko@ifanbel.bas-net.by
Russian Federation, Saint-Petersburg, 194156
G. P. Yablonskii
Stepanov Institute of Physics of National Academy of Sciences of Belarus
Email: e.lutsenko@ifanbel.bas-net.by
Belarus, Minsk, 220072