Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing
- Authors: Buchin E.Y.1, Naumov V.V.1, Vasilyev S.V.1
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Affiliations:
- Institute of Physics and Technology, Yaroslavl Branch
- Issue: Vol 51, No 6 (2017)
- Pages: 812-816
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/200105
- DOI: https://doi.org/10.1134/S1063782617060069
- ID: 200105
Cite item
Abstract
It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu3Si phase.
About the authors
E. Yu. Buchin
Institute of Physics and Technology, Yaroslavl Branch
Author for correspondence.
Email: imi.buchin@rambler.ru
Russian Federation, Yaroslavl, 150007
V. V. Naumov
Institute of Physics and Technology, Yaroslavl Branch
Email: imi.buchin@rambler.ru
Russian Federation, Yaroslavl, 150007
S. V. Vasilyev
Institute of Physics and Technology, Yaroslavl Branch
Email: imi.buchin@rambler.ru
Russian Federation, Yaroslavl, 150007