Influence of a static magnetic field on the formation of silicide phases in a Cu/Si(100) structure upon isothermal annealing
- Авторы: Buchin E.1, Naumov V.1, Vasilyev S.1
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Учреждения:
- Institute of Physics and Technology, Yaroslavl Branch
- Выпуск: Том 51, № 6 (2017)
- Страницы: 812-816
- Раздел: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/200105
- DOI: https://doi.org/10.1134/S1063782617060069
- ID: 200105
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Аннотация
It is experimentally shown that the process of the solid-phase synthesis of copper silicide is sensitive to magnetic fields. Upon low-temperature vacuum annealing of a Cu/Si(100) thin-film structure, a static magnetic field with moderate strength stimulates the alloying of silicon in copper and suppresses synthesis of the Cu3Si phase.
Об авторах
E. Buchin
Institute of Physics and Technology, Yaroslavl Branch
Автор, ответственный за переписку.
Email: imi.buchin@rambler.ru
Россия, Yaroslavl, 150007
V. Naumov
Institute of Physics and Technology, Yaroslavl Branch
Email: imi.buchin@rambler.ru
Россия, Yaroslavl, 150007
S. Vasilyev
Institute of Physics and Technology, Yaroslavl Branch
Email: imi.buchin@rambler.ru
Россия, Yaroslavl, 150007