Formation and properties of the buried isolating silicon-dioxide layer in double-layer “porous silicon-on-insulator” structures
- Authors: Ivlev K.E.1, Roslikov V.E.1, Bolotov V.V.1, Knyazev E.V.1, Ponomareva I.V.1, Kan V.E.1, Davletkildeev N.A.1
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Affiliations:
- Omsk Scientific Center, Siberian Branch
- Issue: Vol 51, No 1 (2017)
- Pages: 49-53
- Section: Microcrystalline, Nanocrystalline, Porous, and Composite Semiconductors
- URL: https://journals.rcsi.science/1063-7826/article/view/199307
- DOI: https://doi.org/10.1134/S1063782617010043
- ID: 199307
Cite item
Abstract
The oxidation of mesoporous silicon in a double-layer “macroporous silicon–mesoporous silicon” structure is studied. The morphology and dielectric properties of the buried insulating layer are investigated using electron microscopy, ellipsometry, and electrical measurements. Specific defects (so-called spikes) are revealed between the oxidized macropore walls in macroporous silicon and the oxidation crossing fronts in mesoporous silicon. It is found that, at an initial porosity of mesoporous silicon of 60%, three-stage thermal oxidation leads to the formation of buried silicon-dioxide layers with an electric-field breakdown strength of Ebr ~ 104–105 V/cm. Multilayered “porous silicon-on-insulator” structures are shown to be promising for integrated chemical micro- and nanosensors.
About the authors
K. E. Ivlev
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
V. E. Roslikov
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
V. V. Bolotov
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
E. V. Knyazev
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
I. V. Ponomareva
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
V. E. Kan
Omsk Scientific Center, Siberian Branch
Author for correspondence.
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024
N. A. Davletkildeev
Omsk Scientific Center, Siberian Branch
Email: kan@obisp.oscsbras.ru
Russian Federation, Omsk, 644024