Email this article On a silicon-based photonic-crystal cavity for the near-IR region: Numerical simulation and formation technology
- Authors: Serafimovich P.G.1,2, Stepikhova M.V.3,4, Kazanskiy N.L.1,2, Gusev S.A.3,4, Egorov A.V.2, Skorokhodov E.V.3,4, Krasilnik Z.F.3,4
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Affiliations:
- Image Processing Systems Institute
- Samara State Aerospace University (National Research University)
- Institute for Physics of Microstructures
- Nizhny Novgorod State University
- Issue: Vol 50, No 8 (2016)
- Pages: 1112-1116
- Section: Fabrication, Treatment, and Testing of Materials and Structures
- URL: https://journals.rcsi.science/1063-7826/article/view/197739
- DOI: https://doi.org/10.1134/S1063782616080212
- ID: 197739
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Abstract
The production technology of a photonic-crystal cavity formed as a group of holes in a silicon strip waveguide by ion-beam etching is described. The parasitic effect associated with hole conicity which develops upon hole formation by the given technology is studied. Numerical simulation shows that the hole-conicityinduced decrease in the cavity quality factor can be compensated with consideration for the hole volume. The influence of the waveguide thickness on the resonance wavelength and quality factor of the photonic-crystal cavity is analyzed.
About the authors
P. G. Serafimovich
Image Processing Systems Institute; Samara State Aerospace University (National Research University)
Email: mst@ipm.sci-nnov.ru
Russian Federation, Samara, 443001; Samara, 443086
M. V. Stepikhova
Institute for Physics of Microstructures; Nizhny Novgorod State University
Author for correspondence.
Email: mst@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
N. L. Kazanskiy
Image Processing Systems Institute; Samara State Aerospace University (National Research University)
Email: mst@ipm.sci-nnov.ru
Russian Federation, Samara, 443001; Samara, 443086
S. A. Gusev
Institute for Physics of Microstructures; Nizhny Novgorod State University
Email: mst@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
A. V. Egorov
Samara State Aerospace University (National Research University)
Email: mst@ipm.sci-nnov.ru
Russian Federation, Samara, 443086
E. V. Skorokhodov
Institute for Physics of Microstructures; Nizhny Novgorod State University
Email: mst@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
Z. F. Krasilnik
Institute for Physics of Microstructures; Nizhny Novgorod State University
Email: mst@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950; Nizhny Novgorod, 603950
