Epitaxially Grown Monoisotopic Si, Ge, and Si1–xGex Alloy Layers: Production and Some Properties

Abstract

The technology of the growth of Si, Ge, and Si_1–xGe_x layers by molecular-beam epitaxy with the use of a sublimation source of monoisotopic ³⁰Si or ²⁸Si and/or gas sources of monogermane ⁷⁴GeH₄ is demonstrated. All of the epitaxial layers are of high crystal quality. The secondary-ion mass spectroscopy data and Raman data suggest the high isotopic purity and structural perfection of the ³⁰Si, ²⁸Si, ⁷⁴Ge, and ³⁰Si_1–x⁷⁴Ge_x layers. The ³⁰Si layers doped with Er exhibit an efficient photoluminescence signal.