作者的详细信息
Statsenko, V.
期 | 栏目 | 标题 | 文件 |
卷 51, 编号 13 (2017) | Materials for Electronic Engineering | Study of the Structural Properties of Silicon-on-Sapphire Layers in Hydride-Chloride Vapor-Phase Epitaxy | |
卷 53, 编号 15 (2019) | Technological Processes and Routes | Investigation of the Initial Silicon-on-Sapphire Layer Formed by CVD Techniques |